Shape and Functional Elements of the Bulk Silicon Microtechnique [electronic resource] :A Manual of Wet-Etched Silicon Structures / by Joachim Frühauf.
by Frühauf, Joachim [author.]; SpringerLink (Online service).
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BookPublisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.Description: XII, 221 p. 165 illus. online resource.ISBN: 9783540268765.Subject(s): Chemistry | Chemical engineering | Microwaves | Electronics | Optical materials | Chemistry | Optical and Electronic Materials | Electronics and Microelectronics, Instrumentation | Ceramics, Glass, Composites, Natural Methods | Microwaves, RF and Optical Engineering | Industrial Chemistry/Chemical EngineeringOnline resources: Click here to access online | Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| MAIN LIBRARY | Available |
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Technological Basis of Bulk-Silicon-Microtechnique -- Orientation Dependent Etching of Silicon -- General Overview of the Shape- and Functional Elements and the Procedure of their Design -- Simple Shape Elements -- Elements for Mechanical Applications -- Elements for Fluidic Applications -- Elements for Optical Applications.
This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.
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